Publications

Showing results for "loesing" 1-4 of 4

The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.

Title Journal Year
Comparison of secondary ion mass spectroscopy analysis of ultrashallow phosphorus using Cs+, O-2(+), and CsC6- primary ion beams Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 20(2), 507-511. Loesing, R., Guryanov, G. M., Phillips, M. S., & Griffis, D. P. 2002
Secondary ion mass spectrometry depth profiling of ultrashallow phosphorous in silicon Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 18(1), 509-513. Loesing, R., Guryanov, G. M., Hunter, J. L., & Griffis, D. P. 2000
Optimization of SIMS analysis conditions for ultra-shallow phosphorus and arsenic implants Hunter, J. L., Bates, T. B., Patel, S. B., Loesing, R., Guraynov, G., & Griffis, D. P. (2000). Optimization of SIMS analysis conditions for ultra-shallow phosphorus and arsenic implants. In D. B. Williams & R. Shimizu (Eds.) Microbeam Analysis 2000: proceedings of the Second Conference of the International Union of Microbeam Analysis Societies held in Kailua-Kona, Hawaii, 9-14 July 2000. (pp. 327-328). Bristol: Institute of Physics Publishing. Hunter, J. L., Bates, T. B., Patel, S. B., Loesing, R., Guraynov, G., & Griffis, D. P. 2000
Acceptor and donor doping of AlxGa1 xN thin film alloys grown on 6H SiC(0001) substrates via metalorganic vapor phase epitaxy Journal of Electronic Materials, 27(4), 229-232. Bremser, M. D., Perry, W. G., Nam, O.-H., Griffis, D. P., Loesing, R., Ricks, D. A., & Davis, R. F. 1998

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