Publications

Showing results for "beaman" 1-9 of 9

The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.

Title Journal Year
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers Patent:
Beaman, K. L., Weimer, R. A., Breiner, L. D., Ping, E. X., Doan, T. T., Basceri, C., Kubista, D. J., & Zheng, L. A. (2008). Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers. U.S. Patent No. 7,344,755. Washington, DC: U.S. Patent and Trademark Office. Beaman, K. L., Weimer, R. A., Breiner, L. D., Ping, E. X., Doan, T. T., Basceri, C., Kubista, D. J., & Zheng, L. A.
2008
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Patent:
Basceri, C., Doan, T. T., Weimer, R. A., Beaman, K. L., Breiner, L. D., Zheng, L. A., Ping, E. X., Sarigiannis, D., & Kubista, D. J. (2007). Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces. U.S. Patent No. 7,279,398. Washington, DC: U.S. Patent and Trademark Office. Basceri, C., Doan, T. T., Weimer, R. A., Beaman, K. L., Breiner, L. D., Zheng, L. A., Ping, E. X., Sarigiannis, D., & Kubista, D. J.
2007
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition Patent:
Beaman, K. L., Doan, T. T., Breiner, L. D., Weimer, R. A., Ping, E. X., Kubista, D. J., Basceri, C., & Zheng, L. A. (2007). Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition. U.S. Patent No. 7,258,892. Washington, DC: U.S. Patent and Trademark Office. Beaman, K. L., Doan, T. T., Breiner, L. D., Weimer, R. A., Ping, E. X., Kubista, D. J., Basceri, C., & Zheng, L. A.
2007
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces Patent:
Zhaeng, L. A., Doan, T. T., Breiner, L. D., Ping, E. X., Weimer, R. A., Kubista, D. J., Beaman, K. L., & Basceri, C. (2007). Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces. U.S. Patent No. 7,235,138. Washington, DC: U.S. Patent and Trademark Office. Zhaeng, L. A., Doan, T. T., Breiner, L. D., Ping, E. X., Weimer, R. A., Kubista, D. J., Beaman, K. L., & Basceri, C.
2007
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces Patent:
Basceri, C., Doan, T. T., Weimer, R. A., Beaman, K. L., Breiner, L. D., Zheng, L. A., Ping, E. X., Sarigiannis, D., & Kubista, D. J. (2006). Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces. U.S. Patent No. 7,056,806. Washington, DC: U.S. Patent and Trademark Office. Basceri, C., Doan, T. T., Weimer, R. A., Beaman, K. L., Breiner, L. D., Zheng, L. A., Ping, E. X., Sarigiannis, D., & Kubista, D. J.
2006
Gettering issues using MeV ion implantation Materials Science & Engineering. B, Solid-state Materials for Advanced Technology, 72(2-3), 87-92. Rozgonyi, G. A., Glasko, J. M., Beaman, K. L., & Koveshnikov, S. V. 2000
Lateral gettering of Fe on bulk and silicon-on-insulator wafers Journal of the Electrochemical Society, 146(5), 1925-1928. Beaman, K. L., Kononchuk, O., Koveshnikov, S., Osburn, C. M., & Rozgonyi, G. A. 1999
Gettering at vacancy and interstitial-rich regions in MeV ion implanted silicon Diffusion and Defect Data. [Pt. B], Solid State Phenomena, 70(1999), 247-252. Beaman, K. L., Glasko, J. M., Koveshnikov, S. V., & Rozgonyi, G. A. 1999
Gettering of iron in silicon on insulator wafers Applied Physics Letters, 71(8), 1107-1109. Beaman, K. L., Agarwal, A., Kononchuk, O., Koveshnikov, S., Bondarenko, I., & Rozgonyi, G. A. 1997

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