Publications

Showing results for "Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena" 1-1 of 1

The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.

Title Journal Year
Low-temperature growth of silicon dioxide films - a study of chemical bonding by ellipsometry and infrared-spectroscopy Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena, 5(2), 530-537. Lucovsky, G., Manitini, M. J., Srivastava, J. K., & Irene, E. A. 1987

North Carolina State University