Publications

Showing results for "Journal of Vacuum Science & Technology" 1-25 of 207 Next

The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.

Title Journal Year
Rapid visible color change and physical swelling during water exposure in triethanolamine-metalcone films formed by molecular layer deposition Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 34(1). Lemaire, P. C., Oldham, C. J., & Parsons, G. N. 2016
Low temperature platinum atomic layer deposition on nylon-6 for highly conductive and catalytic fiber mats Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 34(1). Mundy, J. Z., Shafiefarhood, A., Li, F. X., Khan, S. A., & Parsons, G. N. 2016
Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using "water-free" metal-halide/metal alkoxide reactants Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 34(1). Atanasov, S. E., Kalanyan, B., & Parsons, G. N. 2016
Atomic layer deposition on polymer fibers and fabrics for multifunctional and electronic textiles Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 34(1). Brozena, A. H., Oldham, C. J., & Parsons, G. N. 2016
Incorporation of Be dopant in GaAs core and core-shell nanowires by molecular beam epitaxy Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 34(2). Ojha, S. K., Kasanaboina, P. K., Reynolds, C. L., Rawdanowicz, T. A., Liu, Y., White, R. M., & Iyer, S. 2016
Hydrogen desorption kinetics for aqueous hydrogen fluoride and remote hydrogen plasma processed silicon (001) surfaces Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 33(5). King, S. W., Davis, R. F., Carter, R. J., Schneider, T. P., & Nemanich, R. J. 2015
Hydrogen desorption from hydrogen fluoride and remote hydrogen plasma cleaned silicon carbide (0001) surfaces Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 33(5). King, S. W., Tanaka, S., Davis, R. F., & Nemanich, R. J. 2015
Conductivity and touch-sensor application for atomic layer deposition ZnO and Al:ZnO on nylon nonwoven fiber mats Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 33(1). Sweet, W. J., Oldham, C. J., & Parsons, G. N. 2015
Systematic study of trimethyl aluminum infiltration in polyethylene terephthalate and its effect on the mechanical properties of polyethylene terephthalate fibers Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 33(1). Padbury, R. P., & Jur, J. S. 2015
Organometallic exposure dependence on organic-inorganic hybrid material formation in polyethylene terephthalate and polyamide 6 polymer fibers Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 33(2). Akyildiz, H. I., & Jur, J. S. 2015
Growth of SrVO3 thin films by hybrid molecular beam epitaxy Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 33(6). Eaton, C., Moyer, J. A., Alipour, H. M., Grimley, E. D., Brahlek, M., LeBeau, J. M., & Engel-Herbert, R. 2015
Desorption and sublimation kinetics for fluorinated aluminum nitride surfaces Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 32(5). King, S. W., Davis, R. F., & Nemanich, R. J. 2014
Gas source molecular beam epitaxy of scandium nitride on silicon carbide and gallium nitride surfaces Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 32(6). King, S. W., Davis, R. F., & Nemanich, R. J. 2014
Comparison of precursor infiltration into polymer thin films via atomic layer deposition and sequential vapor infiltration using in-situ quartz crystal microgravimetry Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 32(4). Padbury, R. P., & Jur, J. S. 2014
Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 32(3). Lomenzo, P. D., Zhao, P., Takmeel, Q., Moghaddam, S., Nishida, T., Nelson, M., Fancher, C. M., Grimley, E. D., Sang, X. H., LeBeau, J. M., & Jones, J. L. 2014
Spectroscopic ellipsometry-A perspective Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 31(5). Aspnes, D. E. 2013
Transport through singlet states in resistive memory materials: Magneli-phase, TinO2n-1 for 9 >= n > 3, and TiO2-HfO2 alloys Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 31(1). Lucovsky, G., & Kim, J. 2013
Noncrystalline SiO2 and GeO2: Process induced pre-existing defects and vacated O-atom intrinsic bonding sites Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 31(1). Lucovsky, G., Kim, J., Wu, K., & Zeller, D. 2013
History of atomic layer deposition and its relationship with the American Vacuum Society Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 31(5). Parsons, G. N., Elam, J. W., George, S. M., Haukka, S., Jeon, H., Kessels, W. M. M., Leskela, M., Poodt, P., Ritala, M., & Rossnagel, S. M. 2013
Large effect of titanium precursor on surface reactivity and mechanical strength of electrospun nanofibers coated with TiO2 by atomic layer deposition Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 31(6). McClure, C. D., Oldham, C. J., Walls, H. J., & Parsons, G. N. 2013
Smooth MgO films grown on graphite and graphene by pulsed laser deposition Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 31(5). Stuart, S. C., Satchet, E., Sandin, A., Maria, J. P., Rowe, J. E., Dougherty, D. B., & Ulrich, M. 2013
Influence of laser irradiation and microwave plasma treatment on the thermal properties of graphene platelets Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 31(4). Zheng, H., & Jagannadham, K. 2013
Atomic layer deposition for electrochemical energy generation and storage systems Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films, 30(1). Peng, Q., Lewis, J. S., Hoertz, P. G., Glass, J. T., & Parsons, G. N. 2012
Optical and structural characterization of epitaxial graphene on vicinal 6H-SiC(0001)-Si by spectroscopic ellipsometry, Auger spectroscopy, and STM Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 30(4). Nelson, F., Sandin, A., Dougherty, D. B., Aspnes, D. E., Rowe, J. E., & Diebold, A. C. 2012
Quantification of cesium surface contamination on silicon resulting from SIMS analysis Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 30(3). Penley, C., Stevie, F. A., & Griffis, D. P. 2012

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