Publications

Showing results for "Journal of Micromechanics and Microengineering" 1-2 of 2

The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.

Title Journal Year
Investigating thin film stresses in stacked silicon dioxide/silicon nitride structures and quantifying their effects on frequency response Journal of Micromechanics and Microengineering, 17(5), 1042-1051. Zohni, O., Buckner, G., Kim, T., Kingon, A., Maranchi, J., & Siergiej, R. 2007
A new test facility for efficient evaluation of MEMS contact materials Journal of Micromechanics and Microengineering, 17(9), 1788-1795. Yang, Z., Lichtenwalner, D., Morris, A., Menzel, S., Nauenheim, C., Gruverman, A., Krim, J., & Kingon, A. I. 2007

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