Showing results for "Journal of Micromechanics and Microengineering" 1-2 of 2
The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.
|Investigating thin film stresses in stacked silicon dioxide/silicon nitride structures and quantifying their effects on frequency response||Journal of Micromechanics and Microengineering, 17(5), 1042-1051.||2007|
|A new test facility for efficient evaluation of MEMS contact materials||Journal of Micromechanics and Microengineering, 17(9), 1788-1795.||2007|