Showing results for "Journal of Microelectromechanical Systems" 1-2 of 2

The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.

Title Journal Year
Comparison of Au and Au-Ni alloys as contact materials for MEMS switches Journal of Microelectromechanical Systems, 18(2), 287-295. Yang, Z. Y., Lichtenwalner, D. J., Morris, A. S., Krim, J., & Kingon, A. I. 2009
Metalorganic chemical vapor deposition Pb(Zr,Ti)O-3 and selected lower electrode structures as a pathway to integrated piezoelectric microelectromechanical systems Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 19(5), 1833-1840. Chen, I. S., Roeder, J. F., Kim, D. J., Maria, J. P., & Kingon, A. I. 2001

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