Showing results for "Journal of Microelectromechanical Systems" 1-2 of 2
The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.
|Comparison of Au and Au-Ni alloys as contact materials for MEMS switches||Journal of Microelectromechanical Systems, 18(2), 287-295.||2009|
|Metalorganic chemical vapor deposition Pb(Zr,Ti)O-3 and selected lower electrode structures as a pathway to integrated piezoelectric microelectromechanical systems||Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures, 19(5), 1833-1840.||2001|