Publications

Showing results for "IEEE Transactions on Semiconductor Manufacturing" 1-1 of 1

The publications on this page are generated nightly from the NCSU Library's Scholarly Publications Repository. This repository is by no means a fully comprehensive listing of publications. Publications can be added to the repository manually by visiting the Publications Repository Submission Form.

Title Journal Year
Effect of UV/VUV enhanced RTP on process variation and device performance of metal gate high-kappa gate stacks for the sub-90-nm CMOS regime IEEE Transactions on Semiconductor Manufacturing, 18(1), 55-62. Damjanovic, D., Bolla, H. K., Singh, R., Poole, K. F., Senter, H. F., & Narayan, J. 2005

North Carolina State University