|
Service Center Tools
|
C&G rate |
Industry Rate |
| Processing Tools |
|
|
| RF reactor - AlN |
133/day |
200/day |
| MOCVD - III–nitrides |
203/hour |
400/hour |
|
|
|
| Characterization Tools |
|
|
| XRD Philips X-pert |
20/hour |
40/hour |
| XRD Bruker GAADS |
16/hour |
30/hour |
| Surface analysis and modification |
60/hour |
100/hour |
All tools can be used only by qualified and approved operators.
Operator asistance is available at additional cost.
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