MSE 751 Spring 2009 MSE 704 Fall 2009	MSE 751  Spring 2009
	Syllabus (pdf format) Students Handouts - pdfs of overheads used in class Vacuum Science Kinetic Theory of Gases Sources of Gas in Vacuum Systems Joints in Vacuum Systems Pumping and Rotary Vane Pump Physical Vapor Deposition Evaporation Sputtering Thin Films Chemical vapor Deposition CVD Homework Tests Test 1; Due: Project; Due: Test 2; Due: Student Seminars (Guidelines) Vacuum Gauges; Seminar dates: 2/18/09; All presentations in this set are due by 5PM, 2/17/09 to sitar@ncsu.edu . Mechanical Gauges (Jackson) Bourdon and Diaphragm Capacitance Thermal Conductivity Gauges (Beth) Thermocouple Pirani Convectron Ionization Gauges Hot Cathode Cold Cathode Mass spectrometers (Jason) Quadrupole Mass Spectrometer-QMS Vacuum Pumps; Seminar dates: 2/25/09 ; All presentations in this set are due by 5PM, 2/23/09 to sitar@ncsu.edu . Mechanical Pumps Membrane (Jason) Roots Momentum Transfer Pumps Venturi,Water (Beth) Diffusion (Jackson) Turbo Capture Pumps Sorption Cryo Sublimation Ion Getter Physical Vapor Deposition; Sputtering/Plasma; Seminar dates: 3/30/09; All presentations in this set are due by 3/28/09 to sitar@ncsu.edu . Plasma Diagnostics with a Langmuir Probe Magnetron Sputtering Ion beam sputtering Electron Cyclotron Resonance Inductively Coupled Plasma Deposition Monitors; presentations due: Quartz Microbalance (Jason) Electron Impact Emission Spectroscopy Optical Interferometry (Beth) RHEED Oscillations (Jackson) Ellipsometry Chemical Vapor Deposition Gas Management; Presentations due: Mass Flow Controllers Upstream/Downstream Pressure Control Exhaust Management - Scrubber, Burn Box Induction Heating Hydrogen Purification - Pd Cell Miscellaneous